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Mathematical modeling of the gas-phase chemistry in the decomposition of chlorosilanes in mixtures of carbon dioxide and hydrogen at high temperatures

Nitodas; SF; Sotirchos; SV

Journal: JOURNAL OF THE ELECTROCHEMICAL SOCIETY Year: 2002 Volume: 149 Issue: 2 Pages: C112-C119
DΟΙ: https://doi.org/10.1149/1.1432671