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XPS investigation of the interaction between TiCl4(THF)2 and AlEt3 modified SiOx/Si(1 0 0) surfaces

Ntais; S; Siokou; A

Journal: SURFACE SCIENCE Year: 2006 Volume: 600 Issue: 18 Pages: 4216-4220
DΟΙ: https://doi.org/10.1016/j.susc.2006.01.147
Research Fields: