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Total SiH4/H2 pressure effect on microcrystalline silicon thin films growth and structure

Katsia; E; Amanatides; E; Mataras; D; Soto; A; Voyiatzis; GA

Journal: SOLAR ENERGY MATERIALS AND SOLAR CELLS Year: 2005 Volume: 87 Issue: 1-4 SI Pages: 157-167
DΟΙ: https://doi.org/10.1016/j.solmat.2004.07.021
Research Fields: