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Temperature effect and stress on microcrystalline silicon thin films deposited under high pressure plasma conditions

Amanatides; E; Katsia; E; Mataras; D; Soto; A; Voyiatzis; GA

Journal: THIN SOLID FILMS Year: 2006 Volume: 511 Issue: Pages: 603-607
DΟΙ: https://doi.org/10.1016/j.tsf.2005.12.121
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