Publication
SURFACE MODIFICATION OF A-SIC THIN-FILMS WITH EX-SITU HYDROGENATION
Journal: SOLID STATE COMMUNICATIONS
Year: 1995
Volume: 96
Issue: 10
Pages: 735-738
https://doi.org/10.1016/0038-1098(95)00526-9
https://doi.org/10.1016/0038-1098(95)00526-9