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Surface-activation processes and ion-solid interactions during the nucleation and growth of ultra-thin amorphous carbon films

Patsalas; P; Logothetidis; S; Kennou; S; Gravalidis; C

Journal: THIN SOLID FILMS Year: 2003 Volume: 428 Issue: 43862 Pages: 211-215
DΟΙ: https://doi.org/10.1016/S0040-6090(02)01265-8