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Oxidation of thin erbium and erbium silicide overlayers in contact with silicon oxide films thermally grows on silicon

Kennou; S; Ladas; S; Grimaldi; MG; Tan; TAN; Veuillen; JY

Journal: APPLIED SURFACE SCIENCE Year: 1996 Volume: 102 Issue: Pages: 142-146
DΟΙ: https://doi.org/10.1016/0169-4332(96)00034-7