Publication
Measurement of intrinsic and laser heating-induced stress in microcrystalline silicon thin films
Journal: CHEMICAL PHYSICS
Year: 2016
Volume: 469
Issue:
Pages: 65-71
https://doi.org/10.1016/j.chemphys.2016.02.012
https://doi.org/10.1016/j.chemphys.2016.02.012