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Publication

Hydrogen chloride effects on the CVD of silicon carbide from methyltrichlorosilane

Papasouliotis; GD; Sotirchos; SV

Journal: CHEMICAL VAPOR DEPOSITION Year: 1998 Volume: 4 Issue: 6 Pages: 235-246
DΟΙ: https://doi.org/10.1002/(SICI)1521-3862(199812)04:063.0.CO;2-R