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Experimental study of atmospheric pressure chemical vapor deposition of silicon carbide from methyltrichlorosilane

Papasouliotis; GD; Sotirchos; SV

Journal: JOURNAL OF MATERIALS RESEARCH Year: 1999 Volume: 14 Issue: 8 Pages: 3397-3409
DΟΙ: https://doi.org/10.1557/JMR.1999.0460