Publication
Effects of residence time and reaction conditions on the deposition of silica- alumina- and aluminosilicates from CH3SiCl3- AlCl3- CO2- and H-2 mixtures
Journal: CHEMICAL VAPOR DEPOSITION
Year: 2001
Volume: 7
Issue: 4
Pages: 157-166
https://doi.org/10.1002/1521-3862(200107)7:43.0.CO;2-P
https://doi.org/10.1002/1521-3862(200107)7:43.0.CO;2-P