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Codeposition of SiC and C from mixtures of methyltrichlorosilane and ethylene in hydrogen

Kostjuhin; IM; Sotirchos; SV

Journal: INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH Year: 2001 Volume: 40 Issue: 12 Pages: 2586-2596
DΟΙ: https://doi.org/10.1021/ie000960u