Publication

Co-deposition of silica- alumina- and aluminosilicates hom mixtures of CH3SiCl3- AlCl3- CO2- and H-2. Thermodynamic analysis and experimental kinetics investigation

Nitodas; SF; Sotirchos; SV


Journal: CHEMICAL VAPOR DEPOSITION Year: 1999 Volume: 5 Issue: 5 Pages: 219-231
DΟΙ: https://doi.org/10.1002/(SICI)1521-3862(199910)5:53.0.CO;2-U