Publication
Co-deposition of silica- alumina- and aluminosilicates hom mixtures of CH3SiCl3- AlCl3- CO2- and H-2. Thermodynamic analysis and experimental kinetics investigation
Journal: CHEMICAL VAPOR DEPOSITION
Year: 1999
Volume: 5
Issue: 5
Pages: 219-231
https://doi.org/10.1002/(SICI)1521-3862(199910)5:53.0.CO;2-U
https://doi.org/10.1002/(SICI)1521-3862(199910)5:53.0.CO;2-U