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Chemical vapor deposition of aluminosilicates from mixtures of SiCl4- AlCl3- CO2- and H-2

Nitodas; SF; Sotirchos; SV

Journal: JOURNAL OF THE ELECTROCHEMICAL SOCIETY Year: 2000 Volume: 147 Issue: 3 Pages: 1050-1058
DΟΙ: https://doi.org/10.1149/1.1393312