Publication
Chemical vapor deposition of aluminosilicates from mixtures of SiCl4- AlCl3- CO2- and H-2
Journal: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Year: 2000
Volume: 147
Issue: 3
Pages: 1050-1058
https://doi.org/10.1149/1.1393312
https://doi.org/10.1149/1.1393312