Publication
Characterization of light emitting silicon nanopillars produced by lithography and etching
Journal: APPLIED SURFACE SCIENCE
Year: 1996
Volume: 102
Issue:
Pages: 377-380
https://doi.org/10.1016/0169-4332(96)00081-5
https://doi.org/10.1016/0169-4332(96)00081-5