Publication
Characterization of ex-situ hydrogenated amorphous SiC thin films by X-ray photoelectron spectroscopy
Journal: APPLIED SURFACE SCIENCE
Year: 1995
Volume: 90
Issue:
Pages: 283-287
https://doi.org/10.1016/0169-4332(95)00075-5
https://doi.org/10.1016/0169-4332(95)00075-5